Semiconductor characterization techniques
experimental techniques to characterize semiconductor devices and materials
Semiconductor characterization techniques are used to characterize a semiconductor material or device (p–n junction, Schottky diode, solar cell, etc.). Some examples of semiconductor properties that could be characterized include the depletion width, carrier concentration, carrier generation and recombination rates, carrier lifetimes, defect concentration, and trap states.
Electrical characterization techniques
Electrical characterization can be used to determine resistivity, carrier concentration, mobility, contact resistance, barrier height, depletion width, oxide charge, interface states, carrier lifetimes, and deep level impurities.
Two-point probe
Four-point probe
Differential Hall effect
Capacitance voltage profiling
Deep-level transient spectroscopy (DLTS)
Electron beam-induced current
Drive-level capacitance profiling (DLCP)
Current–voltage characteristic (I–V)
Suns–VOC (Pseudo I–V)
Photoconductance decay (PCD)
Optical characterization techniques
Microscopy
Ellipsometry
Photoluminescence
Electroluminescence
Absorption or transmission spectroscopy
Raman spectroscopy
Fourier-transform infrared spectroscopy
Reflectance modulation
Cathodoluminescence
Physical and chemical characterization techniques
Electron beam techniques
Scanning Electron Microscopy (SEM)
Transmission Electron Microscopy (TEM)
Auger electron spectroscopy (AES)
Electron microprobe (EMP)
Electron energy loss spectroscopy (EELS)
Ion beam techniques
Sputtering
Secondary ion mass spectrometry (SIMS)
Rutherford backscattering spectrometry (RBS)
X-ray techniques
X-ray fluorescence (XRF)
X-ray photoelectron spectroscopy (XPS)
X-ray diffraction (XRD)
X-ray topography
Neutron activation analysis (NAA)
Chemical etching
Future characterization methods
Many of these techniques have been perfected for silicon, making it the most studied semiconductor material. This is a result of silicon's affordability and prominent use in computing. As other fields such as power electronics, LED devices, and photovoltaics develop, characterization of a variety of alternative materials (including organic semiconductors) will continue to increase in importance. Many existing characterization methods will need to be adapted to accommodate the peculiarities of these new materials.
References
Schroder, Dieter K. Semiconductor Material and Device Characterization. 3rd Ed. John Wiley and Sons, Inc.
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