Electron microscope
a magnifying system capable of showing the interior or surface of a microscopic object by means of directed electron beams

An electron microscope is a microscope that uses a beam of electrons as a source of "illumination". It uses electron optics that are analogous to the glass lenses of an optical light microscope to control the electron beam, for instance focusing it to produce magnified images or electron diffraction patterns. As the wavelength of an electron can be more than 100,000 times smaller than that of visible light, electron microscopes have a much higher resolution of about 0.1 nm, which compares to about 200 nm for light microscopes. Electron microscope may refer to:
Transmission electron microscope (TEM) where swift electrons go through a thin sample
Scanning transmission electron microscope (STEM) which is similar to TEM with a scanned electron probe
Scanning electron microscope (SEM) which is similar to STEM, but with thick samples
Electron microprobe similar to a SEM, but more for chemical analysis
Low-energy electron microscope (LEEM), used to image surfaces
Photoemission electron microscope (PEEM) which is similar to LEEM using electrons emitted from surfaces by photons
Additional details can be found in the above links.
This article contains some general information about different types of these instruments, mainly about transmission and scanning electron microscopes with a little information about other types and brief sections with links to longer articles about some of the ways to use these instruments, how to make samples and some of the limitations.
History
Many developments laid the groundwork of the electron optics used in microscopes. One significant step was the work of Hertz in 1883 who made a cathode-ray tube with electrostatic and magnetic deflection, demonstrating manipulation of the direction of an electron beam. Others were focusing of the electrons by an axial magnetic field by Emil Wiechert in 1899, improved oxide-coated cathodes which produced more electrons by Arthur Wehnelt in 1905 and the development of the electromagnetic lens in 1926 by Hans Busch. According to Dennis Gabor, the physicist Leó Szilárd tried in 1928 to convince him to build an electron microscope, for which Szilárd had filed a patent. To this day the issue of who invented the transmission electron microscope is controversial.
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This entry incorporates text from “Electron microscope” on English Wikipedia. Contributors are listed in the page history. Text is available under the Creative Commons Attribution-ShareAlike 4.0 License. Selected authority identifiers and statements are retrieved from Wikidata under CC0; their references and qualifiers remain part of the verification path.