14 nm process
MOSFET technology node

The 14 nanometer process refers to a marketing term for the MOSFET technology node that is the successor to the 22 nm node. The 14 nm was so named by the International Technology Roadmap for Semiconductors (ITRS). Until about 2011, the node following 22 nm was expected to be 16 nm. All 14 nm nodes use FinFET technology, a type of multi-gate MOSFET technology that is a non-planar evolution of planar silicon CMOS technology.
This brief starts where responsible research should: with the source description of “14 nm process” as mOSFET technology node. Everything that follows is an evidence route, not borrowed authority.
Why this record matters
The subject matters to the science & nature register because the source frames it as mOSFET technology node. Its deeper value depends on whether names, dates, institutions and citations support that framing.
The date and method of observation matter as much as the stated conclusion, especially where classification or consensus has changed. The source revision retrieved here is dated Jun 17, 2026. The first chronological checks are 2011.
Scientific names, classifications and consensus can change while older terminology persists in catalogues and historical literature. The lead is largely declarative, so disagreement and counter-evidence require a deliberate search beyond the opening account. Authority statements aid reconciliation but still require their own references, qualifiers and ranks to be checked.
How to read it
Check terminology, classification and the date of the cited evidence. Scientific names and technical consensus can change while older records retain historical value.
- Current terminology
- Classification context
- Finding cited technical literature
Primary datasets, specimen catalogues, standards bodies and the most recent peer-reviewed literature.
Three-step research path
- Establish the record: confirm the title “14 nm process”, its source revision and the description used here.
- Expand the search: follow 14 nm process primary sources, 14 nm process archive and process research across catalogues and specialist indexes.
- Test the account: compare the strongest cited source with the responsible institution’s current record and note any disagreement.
Questions for further research
- Which source most directly establishes the central claim about “14 nm process”?
- Which observation, specimen, dataset or publication supports the account?
- Is the terminology current, historical or disputed?
Search terms from this dossier
This entry incorporates text from “14 nm process” on English Wikipedia. Contributors are listed in the page history. Text is available under the Creative Commons Attribution-ShareAlike 4.0 License. Selected authority identifiers and statements are retrieved from Wikidata under CC0; their references and qualifiers remain part of the verification path.